A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure

A high-performance silicon-on-insulator MEMS gyroscope operating at atmospheric pressure

This paper presents a new, high-performance silicon-on-insulator (SOI) MEMS gyroscope with decoupled oscillation modes. The gyroscope tructure allows it to achieve matched-resonance-frequencies, large drive-mode oscillation amplitude, high sense-mode quality factor, and low echanical cross-talk. The gyroscope is fabricated through the commercially available SOIMUMPS process of MEMSCAP Inc. The ...

Optical MEMS in Bonded Silicon on Insulator

Bonded silicon on insulator (BSOI) material provides an excellent solution for optical MEMS devices, which typically require optical surfaces with high flatness and low roughness to be combined with high quality mechanical parts and low power, high force microactuators. This paper will review a number of different approaches to optical MEMS, including surface tension self-assembly for 3D compon...

Analysis of Frequency Response and Scale-Factor of Tuning Fork Micro-Gyroscope Operating at Atmospheric Pressure

This paper presents a study of the frequency response and the scale-factor of a tuning fork micro-gyroscope operating at atmospheric pressure in the presence of an interference sense mode by utilizing the approximate transfer function. The optimal demodulation phase (ODP), which is always ignored in vacuum packaged micro-gyroscopes but quite important in gyroscopes operating at atmospheric pres...

Electrical behavior of ultra - thin body silicon - on - insulator n - MOSFETs at a high operating temperature

Preliminary Study on The Design of A Silicon Bio-inspired MEMS Gyroscope

Micromachined gyroscopes for measuring rate or angle of rotation have attracted a lot of attention during the past few years for several applications. They are widely used to detect orientation in space, including automotive applications for ride stabilization and rollover detection; some consumer electronic applications, such as video-camera stabilization, virtual reality, and inertial mouse f...